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Patent Searching and Data


Title:
SINGLE CRYSTAL PRODUCING APPARATUS
Document Type and Number:
Japanese Patent JPH11217292
Kind Code:
A
Abstract:

To provide a single crystal producing apparatus for pulling up a single crystal while retaining a neck part formed on the single crystal, capable of readily controlling a pulling up wire after the retention of a single crystal without causing the function deterioration caused by high temperature of the single crystal producing apparatus.

This single crystal producing apparatus is provided with a single crystal retaining apparatus 13 which is equipped with a plurality of claws 15 rockingly in the vertical direction in a range of a fixed angle at the bottom and hung at a fixed position in a furnace and a seed holder 5 fixed through an elastic body 17 to the lower side of a retaining apparatus placing member 16 fitted to a single crystal pulling up wire 4. A large diameter part 9a formed on a neck part 9b pushes up the claws 15 and passes the claws. After the claws 15 are stopped at the lower limit position, the retaining apparatus placing member 16 is brought into contact with the top of the single crystal retaining apparatus 13 to pull up the single crystal while supporting the single crystal retaining apparatus 13.


Inventors:
KUROSAKA SHOEI
TOMIOKA JUNSUKE
KOBAYASHI MASAKAZU
YOSHIMOTO AKIHIRO
OJI NARUTOSHI
MIMURA KAZUHIRO
KADOTA HIROSHI
YOSHINADA YUTAKA
OKAMURA KENJI
Application Number:
JP3352498A
Publication Date:
August 10, 1999
Filing Date:
February 02, 1998
Export Citation:
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Assignee:
KOMATSU DENSHI KINZOKU KK
KOMATSU MFG CO LTD
KOMATSU KOKI KK
International Classes:
C30B15/30; H01L21/208; (IPC1-7): C30B15/30
Attorney, Agent or Firm:
Matsuzawa Osamu