Title:
SINGLE CRYSTAL PRODUCTION APPARATUS
Document Type and Number:
Japanese Patent JP2939715
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain an improved single crystal production apparatus effective for preventing the clouding of an inspection window caused by the deposition of a component having high vapor pressure without causing the disturbance of the thermal balance in the furnace, etc.
SOLUTION: An inspection window 3 is provided with a protection cover 31 surrounding a quartz rod 30 for inspection. The protection cover 31 is composed of a cover main body 31a surrounding the side face 30b of the rod protruding into the furnace 2 excluding the end face 30a of the quartz rod 30 in the furnace and a flange part 31b formed on the upper edge of the cover main body 31a. The flange part 31b is bonded and integrated to a reflector 40 of a water-cooled reflector part 4 in a high-pressure vessel 2 and the cover main body 31a is cooled by the flange. When the gas component in the high-pressure vessel 2 is brought into contact with the cover main body 31a during the growth of crystal, the gas component is cooled, solidified and deposited on the surface of the cover main body 31a. Accordingly, the solidification and deposition of the gas component on the end face 30a of the quartz rod in the furnace can be prevented to prevent the clouding of the end face of the rod.
Inventors:
SHIMIZU HIDEKAZU
Application Number:
JP19664695A
Publication Date:
August 25, 1999
Filing Date:
August 01, 1995
Export Citation:
Assignee:
JAPAN ENAJII KK
International Classes:
C30B15/26; C30B27/02; C30B29/40; F27D21/02; (IPC1-7): C30B15/26
Domestic Patent References:
| JP62119188A | ||||
| JP63270390A | ||||
| JP61168590A | ||||
| JP459690A | ||||
| JP6279883U |
Attorney, Agent or Firm:
Hiroshi Arafune