Title:
SINGLE CRYSTAL PULLING APPARATUS
Document Type and Number:
Japanese Patent JPS6027682
Kind Code:
A
Abstract:
PURPOSE:To suppress the thermal convection of a molten liquid and obtain a high-quality single crystal, and to facilitate the cleaning of the apparatus, by placing a vertical movable magnet to apply a magnetic field to the solid-liquid interface of the molten liquid. CONSTITUTION:The seed crystal 4 is dipped in the molten liquid 4, and the single crystal 7 is pulled up at a constant rate while suppressing the thermal convection of the molten liquid 1 by the magnetic field having required strength and applied to the solid-liquid interface 6 by the magnet 10. The center line of the magnet 10 is adjusted to coincide with the solid-liquid interface 6 during the above operation. The position of the interface 6 lowering according to the growth of the single crystal 7 is detected with the detector 16, and the magnet 10 is lowered with the driving means 14 controlled by the vertical position controlling means 17 to keep the center line of the magnet 10 constantly to the level of the interface 6. Magnetic field having required strength can be applied constantly to the interface, and the cleaning, etc. of the apparatus can be performed easily by moving the magnet 10 along the direction of arrow 18.
Inventors:
MATSUTANI KINYA
SASAKI KATSUTOKI
SASAKI KATSUTOKI
Application Number:
JP13660583A
Publication Date:
February 12, 1985
Filing Date:
July 26, 1983
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
C30B15/00; C30B15/30; C30B30/04; (IPC1-7): C30B15/00
Domestic Patent References:
| JPS59199597A | 1984-11-12 |
Attorney, Agent or Firm:
Takehiko Suzue
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