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Title:
SINGLE METALLIC MASK FOR LASER ABLATION
Document Type and Number:
Japanese Patent JPH08257779
Kind Code:
A
Abstract:

To disclose a laser ablation mask durable against a specific range of laser fluence.

This mask is provided with a perforated aluminum single layer 3 on a substrate 2 of quartz. The thickness of the aluminum layer is specified to the range of nearly 2 μm to nearly 6 μm. A laser projection etching technique for using the ablation mask is disclosed. The mask is, therefore, durable against laser fluence of the range of nearly 200 to 500 mJ/cm2.


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JP5382826Linear drive device, variable shutter device, beam forming device, beam irradiation device, defect correction method and pattern substrate manufacturing method The present invention relates to a linear drive device, a variable shutter device, a beam forming device, a beam forming device, and a beam forming device. The present invention relates to a defect repair method and a method for manufacturing a pattern substrate.
JP3518351FORMATION OF COMPLEX SHAPE TO SURFACE OF WORKING PRODUCT WITH ENERGY BEAM AND PRODUCT OBTAINED BY THIS METHOD
Inventors:
UIRIAMU EICHI ADOBUOKEITO
SUURUYANARAAYANA MUTSUKABUITSU
RAAJIESHIYU SHIYANKERURAARU PA
MAAKU EI TAKACHIYU
Application Number:
JP6233196A
Publication Date:
October 08, 1996
Filing Date:
March 19, 1996
Export Citation:
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Assignee:
IBM
International Classes:
B23K26/066; (IPC1-7): B23K26/06
Attorney, Agent or Firm:
Kiyoshi Goda (2 outside)



 
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