Title:
SINTERED ALUMINUM NITRIDE, AND BOARD USING THE SAME FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2001097780
Kind Code:
A
Abstract:
To provide a sintered aluminum nitride of controlled metallization failure rate, and also to provide a board using the same for semiconductor devices.
This sintered aluminum nitride exhibits an orange color, when irradiated with black light of 3,650 in wavelength and ultraviolet strength of 3,730 mW/cm2, and has a liquid phase component composed of a Y-Al-O-based compound on a surface irradiated with the black light.
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Inventors:
HATORI TAKAE
SANO TAKASHI
SANO TAKASHI
Application Number:
JP28057499A
Publication Date:
April 10, 2001
Filing Date:
September 30, 1999
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA ELECTRONIC ENG
TOSHIBA ELECTRONIC ENG
International Classes:
H05K1/03; C04B35/584; H01L23/15; (IPC1-7): C04B35/584; H01L23/15; H05K1/03
Domestic Patent References:
JPH02307871A | 1990-12-21 | |||
JPH06107485A | 1994-04-19 | |||
JPH05319965A | 1993-12-03 | |||
JPH0653624A | 1994-02-25 | |||
JPH0891935A | 1996-04-09 | |||
JPH02180761A | 1990-07-13 | |||
JPH05238830A | 1993-09-17 | |||
JPH0354168A | 1991-03-08 | |||
JPH08119742A | 1996-05-14 | |||
JPH04285071A | 1992-10-09 | |||
JPH01311252A | 1989-12-15 | |||
JPS62167260A | 1987-07-23 | |||
JPS62287133A | 1987-12-14 | |||
JPS6066942A | 1985-04-17 |
Attorney, Agent or Firm:
Suyama Saichi