Title:
SINTERED BODY AND AMORPHOUS FILM
Document Type and Number:
Japanese Patent JP2014159634
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a sintered body capable of obtaining an amorphous film having a low refractive index, which is a transparent conductive film capable of maintaining excellent transmissivity of visible light and excellent conductivity.SOLUTION: In a sintered body comprising zinc (Zn), trivalent metal elements, germanium (Ge) and/or silicon (Si), and oxygen (O), when the total content of the trivalent metal elements is expressed as A mol% in terms of oxides and the total content of the Ge and/or Si is expressed as B mol% in terms of GeOand/or SiO, 15≤A+B≤70 is satisfied. In the sintered body, a bulk resistance is low, and DC sputtering can be possible, and an amorphous thin film having a low refractive index can be formed from the sintered body.
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Inventors:
NARA ATSUSHI
Application Number:
JP2014040381A
Publication Date:
September 04, 2014
Filing Date:
March 03, 2014
Export Citation:
Assignee:
JX NIPPON MINING & METALS CORP
International Classes:
C23C14/34; C04B35/10; C23C14/08; C23C14/24; H01B5/14
Domestic Patent References:
| JP2013144821A | 2013-07-25 | |||
| JP2013189657A | 2013-09-26 |
Foreign References:
| WO2009081885A1 | 2009-07-02 | |||
| WO2012153522A1 | 2012-11-15 | |||
| WO2006070715A1 | 2006-07-06 | |||
| WO2009145152A1 | 2009-12-03 |
Attorney, Agent or Firm:
Isamu Ogoshi
Kazuteru Ogoshi
Kazuteru Ogoshi