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Title:
SINTERED BODY AND SPUTTERING TARGET
Document Type and Number:
Japanese Patent JP2014034730
Kind Code:
A
Abstract:

To provide a sintered body and a sputtering target consisting of Ag containing FePtC-based low-melting-point material having a high density, low oxygen content and a uniform microstructure.

The sintered body containing Fe, Pt, C and Ag comprises having; a chemical composition expressed by a formula (Fex/100Pt(100-x)/100)100-y-zAgyCz, in which 35≤x≤65, 1≤y≤20 and 13≤z≤60; a relative density of 95% or more; an oxygen content of 700 ppm or less; and a major axis length of a phase consisting of Ag of 20 μm or less. Since a sputtering target consisting of the sintered body has a high density, low oxygen content and a uniform microstructure, the sputtering target is excellent in terms of film properties and capable of forming a high-performance thin film such as a magnetic recording film.


Inventors:
TERAMURA KYOSUKE
Application Number:
JP2012178338A
Publication Date:
February 24, 2014
Filing Date:
August 10, 2012
Export Citation:
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Assignee:
MITSUI MINING & SMELTING CO
International Classes:
C23C14/34; B22F3/14; B22F3/15; C22C5/04; G11B5/851
Attorney, Agent or Firm:
Patent corporation ssinpat