Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SINTERED COMPACT, AND FILM DEPOSITION METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2004244723
Kind Code:
A
Abstract:

To provide a sintered compact for producing a resistance film having high reproducibility and the controllability of resistance value, and to provide a film deposition method using the same.

A sintered compact comprising ≥95 wt.% germanium and tungsten is used as a target in a PVD (Physical Vapor Deposition) system. Preferably, the sintered compact is used as a target in sputtering. The sintered compact is subjected to sputtering to deposit a resistance film on a substrate. The substrate on which the resistance film is deposited is used as a spacer of a picture display device. The weight ratio of tungsten to germanium in the sintered compact is controlled to 0.01 to 10, and the packing ratio of germanium and tungsten in the sintered compact is controlled to ≥60%.


Inventors:
SATO SUSUMU
Application Number:
JP2004013007A
Publication Date:
September 02, 2004
Filing Date:
January 21, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
C23C14/34; C22C27/04; C22C28/00; H01J9/20; H01J9/24; H01J29/87; H01J31/12; (IPC1-7): C22C28/00; C22C27/04; C23C14/34; H01J9/20; H01J9/24
Domestic Patent References:
JP2002069624A2002-03-08
JP2002038258A2002-02-06
JP2000192017A2000-07-11
JP2000154372A2000-06-06
JP2002367540A2002-12-20
Attorney, Agent or Firm:
Jyohei Yamashita
Hiroshi Shimura