Title:
ON-SITE REAL-TIME SHEET-RESISTANCE MEASURING SENSOR SYSTEM AND MEASURING METHOD
Document Type and Number:
Japanese Patent JPH06177217
Kind Code:
A
Abstract:
PURPOSE: To provide a system by selecting and using plural electrodes embedded in an electrostatic chuck, statistically supporting a wafer, impressing a high-frequency excitation signal to this, extracting a response induction signal, operating the realtime measurement of a wafer conductive layer area resistance from those signals, and supplying it to process control. CONSTITUTION: In a measuring sensor system 20, an electrostatic chuck 30 is temperature-controlled by a heating/cooling module 32, and plural distributed electrodes 101-111 are embedded in, for example, a concentric pattern insulated by a spacer 36, and connected with a power source or a sensor at the connecting points of electric wires passing through a through-hole 38. Then, one electrode is used as a chuck electrode, a low-frequency voltage is impressed, and a semiconductor wafer 22 is electrostatically supported. Then, the remaining electrodes are used as sensor electrodes, a high-frequency excitation signal is impressed, and an induction signal is generated in the wafer 22. Then, the radius or the peripheral area resistance of the conductive layer of the wafer 22 are measured in the process from those excitation signals and the induction signal, and fed back to a process controller.
Inventors:
MEERUDATSUDO EMU MOSUREHI
Application Number:
JP23035892A
Publication Date:
June 24, 1994
Filing Date:
August 28, 1992
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC
International Classes:
C23C16/458; C23C16/52; H01L21/66; H01L21/683; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Akira Asamura (2 outside)