Title:
SIZE MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JPH02221807
Kind Code:
A
Abstract:
PURPOSE:To measure the unevenness, etc., of the surface of a body to be measured with high accuracy by providing a slider which can reciprocate associatively with an electric motor with a parallel link mechanism, and also providing a measuring element at one end part. CONSTITUTION:The slider 27 which can reciprocate associatively with the electric motor 28 is provided with the parallel link mechanism 65 and the measuring element 67 is provided at its one end part. The quantity of rotation of the link mechanism 65 which rotates when the measuring element 67 is brought into contact with the body to be measured is detected and the electric motor 28 is driven and controlled so that the quantity of rotation becomes constant. Then the electric motor 28 is driven to elevate the measuring element 67 by a specific quantity above the body to be measured and then the electric motor 28 is reversed to move down the slider 27. Then the measuring element 67 abuts on the body to be measured and stops at the position, but a holder 55 and the slider 27 move up and down relatively and the link mechanism 65 rotates and slants. This slanting is detected by a rotation angle detecting means and the electric motor is driven and controlled with the output signal of the detecting means to make the angle of rotation of the link mechanism 65 constant, and the current position of the measuring element 67 is detected by a displacement detecting means 74.
Inventors:
YAMAMOTO TAKESHI
Application Number:
JP4440389A
Publication Date:
September 04, 1990
Filing Date:
February 22, 1989
Export Citation:
Assignee:
MITUTOYO CORP
International Classes:
G01B21/22; G01B21/00; (IPC1-7): G01B21/22
Attorney, Agent or Firm:
Shinzo Kinoshita (1 person outside)
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