Title:
The Sklar Eve processing method and a blasting device for the Sklar Eve processing
Document Type and Number:
Japanese Patent JP6000025
Kind Code:
B2
Abstract:
To provide a scribing method by blasting that allows forming a groove at high accuracy without masking, a blasting machine that includes an ejection nozzle having a slit-shaped ejection opening with a width of 10 to 500 μm and a length of 5 to 5000 times the width, and an abrasive with a median diameter equal to or less than one-half of a width of the ejection opening of the ejection nozzle and with a maximum particle diameter smaller than a width of the ejection opening are used; and the abrasive is ejected together with compressed gas on a surface of a workpiece at an ejection distance of 0.1 to 3.0 mm and an ejection pressure of 0.2 MPa to 0.6 MPa without masking so that 0.25 cm3 or less of the abrasive is included per 1000 cm3 of the compressed gas discharged from the ejection nozzle.
Inventors:
Keiji Mase
Masato Hibata
Masato Hibata
Application Number:
JP2012190395A
Publication Date:
September 28, 2016
Filing Date:
August 30, 2012
Export Citation:
Assignee:
Fuji Manufacturing Co., Ltd.
International Classes:
B24C1/04; B24C5/02; B24C5/04; B24C11/00; H01L31/18
Domestic Patent References:
| JP2010120134A | ||||
| JP2011093080A | ||||
| JP2003191167A | ||||
| JP10058324A | ||||
| JP2005288618A | ||||
| JP11345989A | ||||
| JP2001156319A |
Attorney, Agent or Firm:
Masaaki Ogura
Tetsuro Tomura
Tetsuro Tomura