SLED AND MANUFACTURE THEREFOR

Japanese Patent JP3760507

B2

PROBLEM TO BE SOLVED: To improve the lubricity of a sliding surface and to eliminate the need of periodical maintenance for maintaining the lubricity or to hardly require it by forming a carbon film with wear resistance and the iubricity on the sliding surface of a sled base body. SOLUTION: At the time of manufacturing this sled, the sled base body S is carried into a vacuum chamber and arranged on a lower electrode while turning the sliding surface S1 toward an upper electrode and the inside of the chamber is evacuated as prescribed first. Then, one or more kinds of gas containing fluorine, gaseous hydrogen and gaseous oxygen is introduced into the chamber as the gas for a pre-processing, high frequency power is supplied to the lower electrode, the gas for the pre-processing is plasmatized and the surface processing of the sliding surface S1 is performed. Then, after evacuating the inside of the chamber again as needed, gaseous hydrocarbon compound is introduced as raw material gas for forming a film, the high frequency power is supplied to the lower electrode and the carbon film F with the wear resistance and the lubricity is formed on the sliding surface S1 of the base body S under plasma.