Title:
Slice device
Document Type and Number:
Japanese Patent JP5948569
Kind Code:
B2
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Inventors:
Koji Tashiro
Masayuki Takahashi
Masayuki Takahashi
Application Number:
JP2013229152A
Publication Date:
July 06, 2016
Filing Date:
November 05, 2013
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
H01L21/304; B24B27/06; B28D5/04
Domestic Patent References:
| JP10128649A | ||||
| JP4023716A | ||||
| JP60161525U | ||||
| JP2000085936A | ||||
| JP60091333U | ||||
| JP2005040922A | ||||
| JP2007185726A | ||||
| JP3024214U | ||||
| JP2010076070A | ||||
| JP2005161455A | ||||
| JP4169204A | ||||
| JP11165250A | ||||
| JP63021542U |
Foreign References:
| US20130087132 |
Attorney, Agent or Firm:
Kentaro Fujii
Kenji Kamada
Hiroo Maeda
Kenji Kamada
Hiroo Maeda