To increase and accelerate the moving speed of a stage mechanism system and prolong the service life of the system, and in addition to enable the system to maintain high accuracy over a long period.
A sliding device for vacuum is provided with a sliding shaft 3 passing through a vacuum chamber 2, an X-stage substrate 4 which is coupled with the shaft 3, and an air slide bearing 5 which guides the shaft 3 outside the chamber 2. The sliding device is also provided with partition walls 6 and 9, which prevent a gas from flowing in the chamber 2 and an actuator 7 on the outside of the chamber 2. The bearing 5 has an air bag for floating the sliding shaft 3 and a discharge groove for discharging the gas. The actuator 7 drives the X-stage substrate 4 via a driving rod in a state where bearing 5 floats the sliding shaft 3.
KATO TAKAYUKI
IWASAKI KENICHI
