Title:
SLIT NOZZLE AND SUBSTRATE TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2023043963
Kind Code:
A
Abstract:
To promote spread of treatment liquid in a longitudinal direction of a discharge port in such a range that an overlapping distance where a discharge port and a substrate overlap each other in a longitudinal direction in plan view from above increases, and uniformly coat the treatment liquid onto the surface of the substrate.SOLUTION: A tip surface of a body part constituting a slit nozzle has a first half opposite region partially overlapping a substrate in a longitudinal direction in plan view from above from a first half of overlapping increase operation, and a second half opposite region which extends in a longitudinal direction from the first half opposite region, and overlaps the substrate in a longitudinal direction in plan view from above in the second half of the overlapping increase operation. The tip surface of the body part is finished so that surface roughness of the first half opposite region becomes larger than surface roughness of the second half opposite region.SELECTED DRAWING: Figure 2A
Inventors:
ABE HIROSHIGE
Application Number:
JP2021151737A
Publication Date:
March 30, 2023
Filing Date:
September 17, 2021
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
B05C5/02; H01L21/027
Attorney, Agent or Firm:
Swing angle Shoichi
Kazumasa Onishi
Kazumasa Onishi