To provide a slit-type coating apparatus capable of suppressing an installation cost, controlling the discharge amount of chemical liquids on start and end of coating, and affording a uniform coating film.
In a slit-type coating apparatus 100 which controls the discharge amount of chemical liquids when coating is started and/or ended is controlled, the apparatus is made up of a mechanism with a single-motion chemical liquid valve 16 which is always closed and turns on/off whether or not the above coating chemical liquid is supplied, a mechanism with an electro-pneumatic change regulator 13 which can be freely changed by electric signals from a controller 12 to drive ( or control) an opening or a closing movement of the chemical liquid valve 16, and a mechanism with the controller 12 to transmit electrical signals to the regulator 13.
IKUMA MASANORI
MITSUI YASUHIRO
