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Title:
SLOT DETECTOR OF CASSETTE FOR SUBSTRATE
Document Type and Number:
Japanese Patent JP2003158170
Kind Code:
A
Abstract:

To eliminate the need for troublesome teaching for a substrate carrying robot when a cassette of substrates is replaced.

A double arm substrate carrying robot 1 comprises a detector for detecting the slot 101 of a cassette 100 of substrates. The slot detector comprises sensors 51-53 which can advance/retract into/from the cassette 100 of substrates and is movable along the arranging direction of a large number of slots 101. Position of each slot in the cassette 100 is detected based the output signals from the sensors 51-53 when they are moved in the arranging direction of the slots in the cassette 100.


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Inventors:
KIMATA KAZUO
NAKAMORI TAKAO
KATO KATSUHIKO
NAKANO KIYONORI
Application Number:
JP2001355127A
Publication Date:
May 30, 2003
Filing Date:
November 20, 2001
Export Citation:
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Assignee:
AITEC KK
International Classes:
B25J13/08; B25J19/02; B65G49/06; B65G49/07; H01L21/66; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B25J13/08; B65G49/06; B65G49/07
Attorney, Agent or Firm:
Takeshi Nakamura



 
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