Title:
SMALL DISPLACEMENT DEVICE
Document Type and Number:
Japanese Patent JP2003194976
Kind Code:
A
Abstract:
To visually confirm small displacement range by driving a piezoelectric actuator with displacement device using a piezoelectric actuator.
A moving stage 3 is capable of rough adjustment in X, Y and Z directions with adjustment screws 5, 6 and 7 and of small displacement with the piezoelectric actuator consisting of piezoelectric elements. A grid placed on the moving stage 3 and a grid placed on a fixed part are arranged face to face with a specific angle and the movement of the moving stage 3 in X, Y and Z directions is made possible of visual observation with motion confirming devices 10, 11 and 12 using a moire fringe.
Inventors:
YAMAMIYA HIROYUKI
MIZUMURA MINEO
YAMAGUCHI MITSUO
MIZUMURA MINEO
YAMAGUCHI MITSUO
Application Number:
JP2001399430A
Publication Date:
July 09, 2003
Filing Date:
December 28, 2001
Export Citation:
Assignee:
SIGMA KOKI KK
International Classes:
G01B11/00; B23Q1/00; B23Q1/34; B23Q1/62; B23Q5/22; G12B5/00; (IPC1-7): G12B5/00; B23Q1/62; B23Q5/22; G01B11/00
Attorney, Agent or Firm:
Kazuo Chikajima (1 person outside)