Title:
小型流体制御装置
Document Type and Number:
Japanese Patent JP6979358
Kind Code:
B2
Abstract:
A miniature fluid control device (1A) for transporting gas is disclosed, which includes a gas inlet plate (11), a resonance plate (12), a piezoelectric actuator (13) and a gas collecting plate (16) stacked on each other. The gas inlet plate (11) includes at least one inlet (110), at least one convergence channel (112) and a circular cavity (111) which forms a convergence chamber. The resonance plate (12) has a central aperture (120). The piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131) and a piezoelectric plate (133), wherein the suspension plate (130) has a cylindrical bulge (130c) aligned with the circular cavity (111). The ratio of a second diameter (D2) of the cylindrical bulge (130c) to a first diameter (D1) of the circular cavity (111) is set in a specified range to optimize the gas pressure of the transported gas, thus assuring efficiency of gas transmission of the miniature fluid control device (1A).
Inventors:
Konobu
Chen Sechang
House
Han Yong Long
黄 ▲けい▼峰
Lee
Chen Sechang
House
Han Yong Long
黄 ▲けい▼峰
Lee
Application Number:
JP2018000322A
Publication Date:
December 15, 2021
Filing Date:
January 04, 2018
Export Citation:
Assignee:
Microjet Technology Co.,Ltd.
International Classes:
F04B45/047; F04B45/04; H01L41/09
Foreign References:
| CN205383064U |
Attorney, Agent or Firm:
Hiroaki Yamauchi