Title:
小型流体制御装置
Document Type and Number:
Japanese Patent JP7004502
Kind Code:
B2
Abstract:
A miniature fluid control device (1A) includes a piezoelectric actuator (13) and a housing (1a). The piezoelectric actuator (13) comprises a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133). The piezoelectric ceramic plate (133) is attached on a first surface (130b) of the suspension plate (130) and has a length not larger than that of the suspension plate (130). The housing (1a) includes a gas collecting plate (16) and a base (10). The gas collecting plate (16) is a frame body with a sidewall (168) and comprises a plurality of perforations (163, 164). The base (10) seals a bottom of the piezoelectric actuator (13) and has a central aperture (120) corresponding to the middle portion (130d) of the suspension plate (130). When the voltage is applied to the piezoelectric actuator (13), the suspension plate (130) is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture (120) of the base (10) to the gas-collecting chamber (162), and exited from the perforations (163, 164).
Inventors:
Chen Sechang
黄 ▲けい▼峰
Han Yonglong
廖 家▲いく▼
Chen Toshihiro
Tetsui Huang
Liao Konobu
Tran Dynasty
程 政▲い▼
Zhang Ying Lun
Zhang Kago
Lee Wei Mei
黄 ▲けい▼峰
Han Yonglong
廖 家▲いく▼
Chen Toshihiro
Tetsui Huang
Liao Konobu
Tran Dynasty
程 政▲い▼
Zhang Ying Lun
Zhang Kago
Lee Wei Mei
Application Number:
JP2017010022A
Publication Date:
January 21, 2022
Filing Date:
January 24, 2017
Export Citation:
Assignee:
Microjet Technology Co.,Ltd.
International Classes:
F04B45/047; B06B1/06; F04B45/04; F16K31/02; H01L41/09; H02N2/04
Domestic Patent References:
| JP2009293566A | ||||
| JP201488790A | ||||
| JP200854367A | ||||
| JP2017133514A |
Foreign References:
| US20140377099 | ||||
| WO2015087086A1 | ||||
| WO2015125608A1 | ||||
| CN104234986A | ||||
| WO2009145064A1 |
Attorney, Agent or Firm:
Shin Shin