小型流体制御装置

Japanese Patent JP7028558

B2

A miniature fluid control device (1A) includes a piezoelectric actuator (13) and a housing (1a). The piezoelectric actuator (13) comprises a suspension plate (130), an outer frame (131), at least one bracket (132) and a piezoelectric ceramic plate (133). The piezoelectric ceramic plate (133) is attached on a first surface (130b) of the suspension plate (130) and has a length not larger than that of the suspension plate (130). The housing (1a) includes a gas collecting plate (16) and a base (10). The gas collecting plate (16) is a frame body with a sidewall (168) and comprises a plurality of perforations (163, 164). The base (10) seals a bottom of the piezoelectric actuator (13) and has a central aperture (120) corresponding to the middle portion (130d) of the suspension plate (130). When the voltage is applied to the piezoelectric actuator (13), the suspension plate (130) is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture (120) of the base (10) to the gas-collecting chamber (162), and exited from the perforations (163, 164).

Chen Sechang
黄 ▲けい▼峰
Han Yonglong
廖 家▲いく▼
Chen Toshihiro
Tetsui Huang
Liao Konobu
Tran Dynasty
程 政▲い▼
Zhang Ying Lun
Zhang Kago
Lee Wei Mei

JP2017010033A

March 02, 2022

January 24, 2017

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Microjet Technology Co.,Ltd.

F04B45/047; F04B45/04

JP2009293566A
JP201488790A
JP200854367A
JP2009131740A

US20140377099
WO2015087086A1
WO2015125608A1
WO2016013390A1

Shin Shin

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