Title:
SMALL-SIZED DIAPHRAGM VALVE AND LIQUID MEDICINE DISCHARGE DEVICE FOR SEMICONDUCTOR WAFER PROCESSING EMPLOYING THE SMALL-SIZED DIAPHRAGM VALVE
Document Type and Number:
Japanese Patent JP2021134859
Kind Code:
A
Abstract:
To provide a small-sized diaphragm valve which is made lightweight by suppressing adoption of metallic components as further as possible by mutually assembling components of a casing and the other components while effectively utilizing a laser, and clean so as to make an atmosphere of a liquid medicine of high corrosion resistance which is used in various kinds of processing of a semiconductor wafer, hard to be contaminated, and a liquid medicine discharge device for semiconductor wafer processing employing the small-sized diaphragm valve suitable for discharging the liquid medicine to a semiconductor wafer while keeping a temperature of the liquid medicine high by effectively utilizing the small-sized diaphragm valve.SOLUTION: In a small-sized diaphragm valve, in the state where a lower lid body 100a is fitted to an opening at one side of a cylinder body in an axial direction by an opening 105b, the opening of the lower lid body and the opening of the cylinder body at one side in the axial direction are fixed to each other by laser welding.SELECTED DRAWING: Figure 1
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Inventors:
MATSUZAWA HIRONOBU
Application Number:
JP2020031620A
Publication Date:
September 13, 2021
Filing Date:
February 27, 2020
Export Citation:
Assignee:
ADVANCE DENKI KOGYO KK
International Classes:
F16K27/10; F16K7/12; F16K7/17
Attorney, Agent or Firm:
間瀬 ▲けい▼一郎