Title:
CONVERGED CHARGED BEAM DEVICE AND WORKING OBSERVING METHOD
Document Type and Number:
Japanese Patent JP3119959
Kind Code:
B2
Abstract:
PURPOSE: To work a transmission electron microscope(TEM) sample in a specified position into a simple and more optimum form, and confirm the thickness of the sample thin film in the site.
CONSTITUTION: An ion beam 2 is emitted to a sample 4, and a TEM sample is manufactured by etching. An electron beam 7 is emitted from the traverse direction to the sample section, secondary electrons, reflected electrons, X-ray and transmitted electrons are detected by respective detectors 5, 9, 10, 11 to conform the working state of the sample. Since their signal intensities are changed depending on the thickness of the sample thin film, the signal intensities are monitored, whereby the thickness of the sample thin film can be estimated in the site.
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Inventors:
Koji Iwasaki
Tatsuya Adachi
Yutaka Ichinomiya
Takashi Kaito
Tatsuya Adachi
Yutaka Ichinomiya
Takashi Kaito
Application Number:
JP1905993A
Publication Date:
December 25, 2000
Filing Date:
February 05, 1993
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
G01N1/32; G01Q30/02; G01Q30/20; H01J37/244; H01J37/28; H01J37/30; H01J37/305; (IPC1-7): H01J37/30; H01J37/244; H01J37/28
Domestic Patent References:
| JP476437A | ||||
| JP6476659A | ||||
| JP320948A |
Attorney, Agent or Firm:
Keinosuke Hayashi