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Title:
SOAKING HIGH-SPEED ELEVATOR PIT
Document Type and Number:
Japanese Patent JP2009124005
Kind Code:
A
Abstract:

To provide a soaking high-speed elevator pit which improves efficiency in heating/cooling an object to be heated, fastens heating and cooling, reduces temperature non-uniformity of the object to be heated and hardly carries dust, generated from a housing under high-temperature environment, to the object to be heated.

A soaking high-speed elevator pit is configured to heat an object 8 to be heated housed within a housing 3 in a longitudinal tubular shape by disposing a heater 2 inside the housing 3. A tubular inner tube 5 is provided inside the housing 3, the heater 2 is disposed between this inner tube 5 and the housing 3, and an interval between the inner tube 5 provided with the heater 2 and the housing 3 is used as a cooling gas passage 6, and a tubular heat reflection panel 4 is provided inside the housing 3. The heat reflection panel 4 is constituted of insulating silicon carbide.


Inventors:
MIURA KUNIAKI
ASAHA MAKOTO
Application Number:
JP2007297771A
Publication Date:
June 04, 2009
Filing Date:
November 16, 2007
Export Citation:
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Assignee:
SUKEGAWA ELEC
International Classes:
H01L21/324; C23C16/46; H01L21/22; H01L21/31
Domestic Patent References:
JP2002164298A2002-06-07
JPS62257721A1987-11-10
JP2001007035A2001-01-12
JP2004311648A2004-11-04
JP2006319175A2006-11-24
JP2004022688A2004-01-22
JP2005166830A2005-06-23
JP2002277054A2002-09-25
JP2002164298A2002-06-07
JPS62257721A1987-11-10
JP2001007035A2001-01-12
JPH08191074A1996-07-23
JPH06349754A1994-12-22
Attorney, Agent or Firm:
Kazuyoshi Hojo