Title:
SOLAR CELL AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH04177880
Kind Code:
A
Abstract:
PURPOSE:To enable energy efficiency to be enhanced inexpensively by depositing a film on a surface of a silicon film and at the same time forming recessed and projecting parts and then enabling a polycrystalline grain diameter to be fully large. CONSTITUTION:A substrate 301 is prepared, a nucleus forming density of a surface of the substrate is controlled by controlling type, flow, deposition temperature, and pressure of a deposition gas, a polycrystalline silicon film 303 whose average grain diameter exceeds 1mum is deposited to a film thickness with an average grain diameter or more from gaseous phase on the substrate 301, thus forming a silicon film with recessed and projecting parts on the surface. Then, by annealing a silicon film at a temperature below a melting point of 1000 deg.C or higher, the crystal grain diameter can be increased to a deposition film thickness or larger and then a solar cell is formed on an obtained polycrystalline silicon film 306 with a large grain diameter, thus obtaining a solar cell with an energy conversion efficiency which is equivalent to the solar cell using a single crystal silicon inexpensively.
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Inventors:
YAMAGATA KENJI
Application Number:
JP30685890A
Publication Date:
June 25, 1992
Filing Date:
November 13, 1990
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/205; H01L21/20; H01L31/04; (IPC1-7): H01L21/20; H01L21/205; H01L31/04
Domestic Patent References:
| JPS5347286A | 1978-04-27 | |||
| JPS5255393A | 1977-05-06 | |||
| JPS6245079A | 1987-02-27 |
Attorney, Agent or Firm:
Fukumori Hisao