太陽電池の製造方法 - MITSUBISHI HEAVY INDUSTRIES,LTD.

Title:

太陽電池の製造方法

Document Type and Number:

Japanese Patent JP5285651

Kind Code:

B2

Abstract:

A process for producing a solar cell is provided which can enhance the photovoltaic conversion efficiency by enlarging the grain sizes in the direction of the thickness of an i-layer to reduce grain boundaries, thereby avoiding recombination of carriers and activating the dopant at the same time. A process for producing a solar cell includes depositing at least a first transparent electrode (12), polycrystalline silicon layers in a PIN structure (13, 14, 15), and a second electrode (16) in sequence on an electrically insulating substrate (11), the polycrystalline silicon layers in a PIN structure including a p-type silicon layer (13), an i-type silicon layer (14), and an n-type silicon layer (15), wherein the polycrystalline silicon layers in a PIN structure are formed by : forming a p-type silicon layer (13), which is then subjected to thermal annealing; depositing an i-type silicon layer (14) on the p-type silicon layer; and depositing an n-type silicon layer (15) on the i-type silicon layer.

Inventors:

Masayuki Kureya
Yoji Nakano
Yoshiki Miyamoto

Application Number:

JP2010086920A

Publication Date:

September 11, 2013

Filing Date:

April 05, 2010

Export Citation:

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