To speed up laser machining, without increasing the output of laser and without power generating burrs in a thin-film solar cell containing the generation layer of a microcrystal-based silicon film.
A solar cell module comprises a substrate 1 and a plurality of power generation cells 5 connected in series. The power generation cells 5 comprise a surface electrode layer 2, a power generation layer 3 containing a microcrystal-based silicon film, and a back electrode layer 4. An isolation groove 8, extended from the surface of the back electrode layer 4 to the surface electrode layer 2, is provided between adjacent power generation cells 5. In the isolation groove 8, a plurality of elliptical patterns 89 are arranged on the surface electrode layer 2. The elliptical pattern 89 includes a deformed region 72 in which the surface of the surface electrode layer 2 has been deformed; and an annular region 71 surrounding the deformed region 72. The adjacent annular patterns 89 partially overlap. In at least 50% of the plurality of elliptical patterns 89, overlapping is provided so that the edge of one annular region 71 and one portion of the other deformed region 72 in those that are adjacent to each other overlap.
SASAGAWA EISHIRO
KURODA MASAHIRO
UDA KAZUTAKA
TAKEUCHI YOSHIAKI
| JP2005166845A | 2005-06-23 | |||
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Keisaku Nakao