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Title:
SOLENOID VALVE WITH IONIZER, VACUUM CHUCK ARRANGED WITH IONIZER, AND RECEIVING STAND WHEREIN IONIZER IS DISPOSED
Document Type and Number:
Japanese Patent JP2008087075
Kind Code:
A
Abstract:

To provide a solenoid valve with an ionizer capable of instantaneously removing a sucker of a vacuum chuck and static electricity generated in a work, and the vacuum chuck and a receiving stand arranged with the ionizer.

The solenoid valves V1, V2 with the ionizer 32 comprises a solenoid valve controlling transmission in an air flow passage of vacuum from a vacuum source 18 and controlling transmission in a flow passage of air pressure from an air pressure source 20, and the ionizer disposed in the common flow passage of vacuum and air pressure to an outlet of the air flow passage. The vacuum chuck or a surface plate 28 with the vacuum chuck is provided with the solenoid valve controlling the transmission in the air flow passage of vacuum from the vacuum source and controlling the transmission in the air flow passage of air pressure from the air pressure source, and the ionizer disposed in the common air flow passage of the vacuum and air pressure to the outlet of the air flow passage.


Inventors:
TAKAYANAGI MAKOTO
Application Number:
JP2006266919A
Publication Date:
April 17, 2008
Filing Date:
September 29, 2006
Export Citation:
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Assignee:
TRINC KK
International Classes:
B23Q3/08; B23Q11/00; H01T19/04; H01T23/00
Domestic Patent References:
JPH07171534A1995-07-11
JPH08262387A1996-10-11
JPH01160838A1989-06-23
JPH0927540A1997-01-28
JPH11166652A1999-06-22
JPH08170754A1996-07-02
JP2004042252A2004-02-12
JP2005294178A2005-10-20
Attorney, Agent or Firm:
Masuaki Tanaka