Title:
ソレノイドバルブ、流量制御装置、流体制御装置および半導体製造装置
Document Type and Number:
Japanese Patent JP7242029
Kind Code:
B2
Abstract:
To improve a sealing performance when a valve of a solenoid valve is closed.SOLUTION: A solenoid valve has: an annular valve seat 17 made of metal alloy; a metal alloy valve body 20 provided contactably and separatably to and from the valve seat 17; and a solenoid actuator 50 for driving the valve body 20. The valve body 20 is formed so that hardness of a portion contacting at least the valve seat is lower than that of the valve seat. The valve seat 17 has a seal face 17a having a curve face curved in a convex shape to the valve body 20. The valve body 20 has an annular groove 21 having a concave-shaped curve face 21a matched with the curve face of the seal face at a position opposed to the seal face 17a.SELECTED DRAWING: Figure 1
More Like This:
| JPH10331994 | FEEDING VALVE AND SLUICE VALVE DEVICE USING THE SAME |
| WO/1996/015398 | APPARATUS FOR ADJUSTING A FEEDER |
Inventors:
Daiki Aiba
Nobu Hirai
Takashi Hirose
Nobu Hirai
Takashi Hirose
Application Number:
JP2018179454A
Publication Date:
March 20, 2023
Filing Date:
September 25, 2018
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
F16K25/00; F16K1/34; F16K1/36; F16K1/42; F16K31/06
Domestic Patent References:
| JP2009144754A | ||||
| JP62187310U | ||||
| JP2000035151A |
Attorney, Agent or Firm:
Patent Attorney Corporation KEN Intellectual Property General Office
Kenji Fujimoto
Kenji Fujimoto