Title:
SOLID PARTICLES MASS MEASUREMENT DEVICE
Document Type and Number:
Japanese Patent JP2019090742
Kind Code:
A
Abstract:
To provide a solid particles mass measurement device that can sensitively detect the content of the solid particles in a gas.SOLUTION: The solid particles mass measurement device includes: a piezoelectric substrate 111; an input electrode 103 and an output electrode 104 located on the piezoelectric substrate 111, with a surface acoustic wave propagation region 105 as a propagation path for a surface acoustic wave 1 in between; a solid particles attachment region 109 in the surface acoustic wave propagation region 105, the solid particles attachment region making solid particles attached; and a solid particles attachment amount detection unit (signal detection circuit 91) for detecting the amount of solid particles attaching to the solid particles attachment region 109.SELECTED DRAWING: Figure 1
Inventors:
ODAKA TAKAHIRO
ISOBE ATSUSHI
ISOBE ATSUSHI
Application Number:
JP2017220689A
Publication Date:
June 13, 2019
Filing Date:
November 16, 2017
Export Citation:
Assignee:
HITACHI METALS LTD
International Classes:
G01N29/02; G01N29/024; H03H9/145
Attorney, Agent or Firm:
Aoritsu patent business corporation