To reduce color unevenness by reducing a ripple by a reflecting light on the boundary between a passivation film and an interlayer insulating film formed on wiring and that on a light receiving surface, in a solid-state imaging device provided with a plurality of wiring layers.
The solid-state imaging device includes a light receiver 102 arranged on a substrate and a plurality of wiring layers (104-108) thereon, and at least one of the wiring layer is arranged on a nearly flat first insulating film (107). In this case, it also includes a part in contact with the first insulating film on the wiring layer (108) arranged on the first insulating film, a second insulating film (109) whose refractive index is different from that of the first insulting film, and a third insulating film that includes a part having two or more different refractive indexes (112 and 113) in the direction of film thickness in at least a portion on the light receiver.
COPYRIGHT: (C)2006,JPO&NCIPI
Akira Okita
Tetsuya Itano
Sakae Hashimoto
Ryuichi Mishima
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Sogo Kuroiwa