Title:
SOLID STATE IMAGING DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2006049825
Kind Code:
A
Abstract:
To raise the condensing efficiency of obliquely incident lights, reduce the smear components and suppress the crosstalk.
The solid state imaging device 12 comprises an optical guide 21 tapered to increase its cross section upward on a photoelectric converter element 12 through an insulation film 16 and an etching stopper film 17 laid on the element 12, and a condensing lens 22 having a structure integrated with the optical guide 21 having a higher refractive index than a layer insulation film 20. The lens 22 is made of the same material as that of the optical wave guide 21.
Inventors:
TOMOSAWA ATSUSHI
FUJII AKIYUKI
TORII HIDEO
MURATA AKIKO
FUJII AKIYUKI
TORII HIDEO
MURATA AKIKO
Application Number:
JP2005141891A
Publication Date:
February 16, 2006
Filing Date:
May 13, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L27/14; G02B3/00; H04N5/335; H04N5/359; H04N5/369; H04N5/372
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Yoneda Keikei
Seki Kei
Yasuya Sugiura
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Yoneda Keikei
Seki Kei
Yasuya Sugiura