Title:
SOLUTION MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2017050460
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a solution manufacturing device capable of suppressing cost of introduction low.SOLUTION: The present invention relates to a solution manufacturing device (44) for manufacturing a solution to be used in a processing device (2) including a chuck table (14) for holding a work piece (11) and processing means (18) for processing the work piece held by the chuck table. The solution manufacturing device comprises: a dissolution unit (46) including a hollow fiber membrane for dissolving a carbon dioxide in pure water; a pure water supply path (48) for supplying the pure water to the dissolution unit; a carbon dioxide supply path (60) for supplying the carbon dioxide to be dissolved in the pure water; a gas supply path (68) for dilution which supplies a gas for dilution for diluting the carbon dioxide; and a mixed gas supply path (56) which is connected to a downstream side of the carbon dioxide supply path via a first flow rate regulation valve (58) and connected to a downstream side of the gas supply path for dilution via a second flow rate regulation valve (66) and supplies a mixed gas in which the carbon dioxide and the gas for dilution are mixed, to the dissolution unit.SELECTED DRAWING: Figure 2
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Inventors:
ARAI MASARU
YOSHIDA MIKI
YOSHIDA MIKI
Application Number:
JP2015173975A
Publication Date:
March 09, 2017
Filing Date:
September 03, 2015
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B01F23/10; B23Q11/10; B24B55/02; H01L21/304
Domestic Patent References:
| JP2002172318A | 2002-06-18 | |||
| JP2013136024A | 2013-07-11 | |||
| JPS62123738A | 1987-06-05 | |||
| JPS62123737A | 1987-06-05 | |||
| JPH08130201A | 1996-05-21 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto