Title:
SOLUTION SENDING DEVICE, SOLUTION SENDING SYSTEM AND SOLUTION SENDING METHOD
Document Type and Number:
Japanese Patent JP2022125383
Kind Code:
A
Abstract:
To provide a solution sending device, a solution sending system and a solution sending method which can send both fluid with high viscosity and washing solution with low viscosity and have a low risk of damage to a pump and a leakage of solvent.SOLUTION: A solution sending system 1 is to send first solution with high viscosity and second solution with low viscosity and comprises: a first pump to send the first solution; a first flow passage to be an intake flow passage of the first pump; a second flow passage to be a discharge flow passage of the first pump; a first bypass flow passage pump which sends the second solution; a first bypass flow passage which is branched from the first flow passage and communicated with an intake port of the first bypass flow passage pump; and a second bypass flow passage which is branched from the second flow passage and communicated with a discharge port of the first bypass flow passage pump. The first solution is pumped with the first pump and the second solution is pumped with the first bypass flow passage pump.SELECTED DRAWING: Figure 1
Inventors:
TATEYAMA AKITO
TOYODA TOMOYUKI
TOYODA TOMOYUKI
Application Number:
JP2021022951A
Publication Date:
August 29, 2022
Filing Date:
February 17, 2021
Export Citation:
Assignee:
KANEKA CORP
International Classes:
F04C14/26; C08G73/10; F04B45/04; F04C14/24