To provide a solvent drying device that controls a mount of remaining solvent in a film on vacuum drying after printing, and a method thereof.
In a solvent drying process after an inkjet printing process, at least two locations within a face of a sample 180 is irradiated with infrared rays 150 for measuring from an infrared ray irradiation device 160, the reflected infrared rays 150 for measuring are received by a detector 170, the amount of the remaining solvent in the film is monitored by infrared absorption spectroscopy, and output of a partial heating device 230 for partially heating the sample 180 is controlled by a control circuit 210 so that the amounts of the remaining solvent in the measured locations become the same based on a detection signal. Variation of electric characteristics of the device within a substrate face is suppressed, and the characteristics can be made uniform.
TAKAGI KIYOHIKO
KITAMURA YOSHIAKI
NAKATANI SHUHEI
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