Title:
均熱処理装置
Document Type and Number:
Japanese Patent JP4942385
Kind Code:
B2
Inventors:
Hisaaki Yamakage
Takeshi Funabiki
Junichi Uno
Takeshi Funabiki
Junichi Uno
Application Number:
JP2006121014A
Publication Date:
May 30, 2012
Filing Date:
April 25, 2006
Export Citation:
Assignee:
Toshiba Mitsubishi Electric Industrial Systems Co., Ltd.
International Classes:
H01L21/027; H01L21/02
Domestic Patent References:
| JP2000311932A | ||||
| JP2006100461A | ||||
| JP2001203152A | ||||
| JP9024322A | ||||
| JP2002203779A | ||||
| JP2002023860A | ||||
| JP2001237157A | ||||
| JP2005026422A | ||||
| JP2001518705A | ||||
| JP9327827A | ||||
| JP63154964U |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki