Title:
SOUND RESPONSE DEVICE
Document Type and Number:
Japanese Patent JP2008016919
Kind Code:
A
Abstract:
To provide a sound response device having a small high sensitivity capacitor exhibiting stabilized characteristics through a simple arrangement.
The sound response device 10 has a capacitor consisting of a fixed electrode film 12 and an oscillatory electrode film 14 formed on a semiconductor substrate 11, wherein a hollow part 15 is provided between the fixed electrode film 12 and the oscillatory electrode film 14. The hollow part 15 is formed by removing a sacrificial layer 18 on the semiconductor substrate 11 by etching. The oscillatory electrode film 14 consists of a tungsten film or a titanium film.
More Like This:
| JP5349247 | Output connector for microphone |
| JP3818411 | MICROPHONE |
Inventors:
MORI MITSUYOSHI
OKINO TORU
OKINO TORU
Application Number:
JP2006183178A
Publication Date:
January 24, 2008
Filing Date:
July 03, 2006
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H04R19/04; B81B3/00; H01G7/02; H04R19/01
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Previous Patent: IMAGE PROCESSOR, IMAGE PROCESSING SYSTEM, AND IMAGE PROCESSING METHOD
Next Patent: WIRELESS COMMUNICATION APPARATUS
Next Patent: WIRELESS COMMUNICATION APPARATUS