Title:
SPATIAL LIGHT MODULATION UNIT, ILLUMINATING OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2015005764
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a spatial light modulation unit that is used in an illuminating optical system and is able to improve the degree of freedom in the intensity level of a pupil intensity distribution.SOLUTION: A spatial light modulation unit used in an illuminating optical system, which illuminates a target illumination face with light from a light source, comprises: a spatial light modulator having a plurality of optical elements arrayed in a predetermined plane and controlled independently; a spatial light modulation element that subjects light made incident on from a light source, to spatial light modulation so that, for each of the optical elements, a luminous flux with an intensity level corresponding to the position of each optical element is made incident on; and a control section that independently controls the optical elements on the basis of information about the intensity level of a luminous flux made incident on each of the optical elements.
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Inventors:
TANITSU OSAMU
Application Number:
JP2014165632A
Publication Date:
January 08, 2015
Filing Date:
August 18, 2014
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B5/10; G02B7/182; G02B7/198; G02B19/00; G03F7/20
Domestic Patent References:
| JP2009105206A | 2009-05-14 | |||
| JP2009105396A | 2009-05-14 | |||
| JP2009272624A | 2009-11-19 | |||
| JP2009105206A | 2009-05-14 | |||
| JP2009105396A | 2009-05-14 | |||
| JP2009272624A | 2009-11-19 |
Foreign References:
| WO2009128293A1 | 2009-10-22 | |||
| WO2009060744A1 | 2009-05-14 | |||
| WO2009150871A1 | 2009-12-17 | |||
| WO2009087805A1 | 2009-07-16 | |||
| WO2009128293A1 | 2009-10-22 | |||
| WO2009060744A1 | 2009-05-14 | |||
| WO2009150871A1 | 2009-12-17 | |||
| WO2009087805A1 | 2009-07-16 |
Attorney, Agent or Firm:
Takao Yamaguchi