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Title:
SPATIAL LIGHT MODULATION UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2011222841
Kind Code:
A
Abstract:

To provide a spatial light modulation unit capable of avoiding, in a reliable manner, optical members from being damaged by light excessively condensed through multiple mirror elements.

A spatial light modulation unit (3), used in an illumination optical system which illuminates a surface to be illuminated with light from a light source, comprises: multiple mirror elements (30a; SEa-SEd) arranged in a predetermined plane and controlled individually; a spatial light modulator (30) in which reflection surfaces of the multiple mirror elements are formed in concave (convex) shape; and light flux conversion element (31) which converts incident light flux into divergent luminous flux (or converging luminous flux ) and guides it to the spatial light modulator.


Inventors:
FUJII TORU
Application Number:
JP2010091976A
Publication Date:
November 04, 2011
Filing Date:
April 13, 2010
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Takao Yamaguchi