Title:
複数の反射面を含む空間光変調器、及び加工物にパターン形成するための方法
Document Type and Number:
Japanese Patent JP5047259
Kind Code:
B2
Abstract:
An apparatus for patterning a work piece including a source, and at least one reflective tilting surface adapted to induce a phase difference using at least one of a phase shifting plate and a difference in step height. A method corresponding to the apparatus for patterning a work piece. A method of manufacturing the apparatus for patterning a work piece and a Spatial Light Modulator, which may be included therein.
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Inventors:
Lung Blood, Ulric
Application Number:
JP2009285070A
Publication Date:
October 10, 2012
Filing Date:
December 16, 2009
Export Citation:
Assignee:
Micronic Laser Systems Activora Get
International Classes:
G02B26/08; B81B3/00; G02B5/18; G02B26/00; G02B26/06; G03F7/20; H01L21/027
Domestic Patent References:
| JP2005116609A | ||||
| JP6102459A |
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Toru Mori
Yutaka Yoshida
Hajime Asamura
Toru Mori
Yutaka Yoshida