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Title:
SPECIMEN HEATING FRAME
Document Type and Number:
Japanese Patent JPH0582528
Kind Code:
A
Abstract:

PURPOSE: To reduce the heater load while cutting down the maintenance coat as well as the attaching and detaching work time by a method wherein a tapered heating frame is spirally trenched and heaters are wound up around the trench to be stuck thereto using a heater press.

CONSTITUTION: The outer periphery of the frame 2 heating a specimen 1 is tapered while a heater containing trench 5 is spirally cut in the tapered part. At this time, the heaters 4 and a heater press 3 in the same taper structure as that of the heating frame 2 are provided. When the heater press 3 is fitted to the heating frame 2, the adherence between the heaters 4 pressed against the heating frame 2 and the heating frame 2 itself can be enhanced. Through these procedures, the heat generated by the heaters 4 can be effectively conducted to the heating frame 2 even in vacuum or low pressure gas atmosphere thereby enabling the heat conductivity to the specimen 1 to be enhanced.


Inventors:
SUMIYA HIROFUMI
KUDO KATSUYOSHI
Application Number:
JP23933091A
Publication Date:
April 02, 1993
Filing Date:
September 19, 1991
Export Citation:
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Assignee:
HITACHI LTD
HITACHI KASADO ENG KK
International Classes:
H01L21/302; H01L21/3065; H01L21/324; H01L21/68; H01L21/683; (IPC1-7): H01L21/302; H01L21/324; H01L21/68
Attorney, Agent or Firm:
Yukihiko Takada



 
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