Title:
試料観察システム及び画像処理方法
Document Type and Number:
Japanese Patent JP7262409
Kind Code:
B2
Abstract:
The invention provides a sample observation system including a scanning electron microscope and a calculator. The calculator: (1) acquires a plurality of images captured by the scanning electron microscope; (2) acquires, from the plurality of images, a learning defect image including a defect portion and a learning reference image not including the defect portion; (3) calculates estimation processing parameters by using the learning defect image and the learning reference image; (4) acquires an inspection defect image including a defect portion; and (5) estimates a pseudo reference image by using the estimation processing parameters and the inspection defect image.
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Inventors:
Naoaki Kondo
Harada Minoru
Youhei Minekawa
Harada Minoru
Youhei Minekawa
Application Number:
JP2020038745A
Publication Date:
April 21, 2023
Filing Date:
March 06, 2020
Export Citation:
Assignee:
Hitachi High-Tech Co., Ltd.
International Classes:
H01L21/66; G01B15/04; G06T7/00; H01J37/22
Domestic Patent References:
| JP2018205163A | ||||
| JP2007184565A | ||||
| JP2010161247A | ||||
| JP8136466A | ||||
| JP2018137275A | ||||
| JP2006269489A | ||||
| JP2001085482A | ||||
| JP2004354251A | ||||
| JP2014145694A |
Foreign References:
| US20190287230 |
Attorney, Agent or Firm:
Patent Attorney Tsutsui International Patent Office