SPECIMEN PROCESSING METHOD - Advantest Corporation

Title:

SPECIMEN PROCESSING METHOD

Document Type and Number:

Japanese Patent JP3230180

Kind Code:

B2

Abstract:

PURPOSE: To increase the processing speed.
CONSTITUTION: A specimen 10 to be processed is scanned by fine particle beam 9 and at least one kind of gases is supplied to an upper part of a region where the specimen is to be processed and a chemical reaction is caused on the region by help of the fine particle beam. In the case a specimen, especially an integrated circuit is processed, a magnetic field generating apparatus 13 is installed near the specimen 10.

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Inventors:

Jurgen Frosien
Dieter Winkel
Hans Chimmermann

Application Number:

JP28363194A

Publication Date:

November 19, 2001

Filing Date:

November 17, 1994

Export Citation:

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Assignee:

Advantest Corporation

International Classes:

H01L21/66; C23C16/04; H01J37/305; H01J37/317; H01L21/00; H01L21/768; (IPC1-7): H01J37/305; H01L21/66

Domestic Patent References:

JP5159960A
JP5114381A
JP63299043A
JP6353844A
JP684831A

Attorney, Agent or Firm:

Hidemori Matsukuma

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