Title:
SPECIMEN SUBSTANCE IDENTIFICATION DEVICE IN PARTICLE-BEAM DEVICE
Document Type and Number:
Japanese Patent JP3697549
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a specimen substance identification device in a particle- beam device, capable of automatically identifying the name of a specimen substance in a short time.
SOLUTION: In a particle-beam device such as EPMA irradiating a particle- beam to a specimen and collecting analysis data such as concentration of constituent elements of the specimen by means of a signal generated from the specimen, this specimen substance identification device is made up of a data input means 2 obtained on the concentration of elements in an unknown specimen, an element designating means 3 used to retrieve the substance name of the specimen, a database 4 storing retrieval data showing the range of concentration of constituent elements characterizing respective substances correspondently to substance names, and a retrieval/identification means 5 for retrieving the substance name of the specimen and identifying the substance name of the specimen based on the specimen element concentration data inputted from the data input means 2, on the designated element name designated by the element designating means 3, and on the retrieval data stored in the database 4.
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Inventors:
Yuki Matsutani
Okumura Toyohiko
Okumura Toyohiko
Application Number:
JP3598799A
Publication Date:
September 21, 2005
Filing Date:
February 15, 1999
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
G01N23/22; G01N23/225; (IPC1-7): G01N23/225
Domestic Patent References:
| JP8220031A | ||||
| JP3051749A |
Attorney, Agent or Firm:
Kenji Mogami
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