PURPOSE: To enable each specimen to be microscopically examined efficiently while plural specimens are being discriminated individually by inserting the plural specimens into a vacuum chamber, and thereby switching each specimen over to a definite position in order.
CONSTITUTION: A device is furnished with a support frame acting as a connecting means which flexibly connects plural specimen holders 8 to one another, and the support frame is made up of a first connecting frame 18 including plural holding sections which hold the specimen holders 8, and of a second connecting frame 22 which flexibly connects the first connecting frame 18. Each specimen holder 8 is mechanically connected to the first connecting frame 18, each specimen holder 8 is moved as the support frame is moved, and when the support frame is suspended, each specimen holder 8 is held as it is while being unaffected by drift and vibration. This arrangement enables plural specimens to be microscopically examined in order with no vacuum condition affected, and also enables pictures to be taken in the high resolving power range while being unaffected by drift and vibration.
TOMITA MASAHIRO
HIRAYAMA KATSUZO
KAZAMA SHUNJI
CITIZEN WATCH CO LTD
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