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Patent Searching and Data


Title:
SPECKLE INTERFEROMETRY SYSTEM
Document Type and Number:
Japanese Patent JP2006275868
Kind Code:
A
Abstract:

To provide a speckle interferometry system of a two-flux illuminating direction switchable type, which simultaneously and precisely carry out respective phase shift operations about illuminations of two fluxes in directions different from each other.

An optical path length adjustable means 60 is disposed at an optical member mount section 10. The optical path length adjustable means 60 is configured such that two phase shift operations are carried out simultaneously in a centralized fashion, wherein optical path length differences between one side illuminating fluxes 14b, 15a which pass through a reflection optical element 61, and the other side illuminating fluxes 14a, 15b which do not pass through the reflection optical element 61, are varied by using one drive means 62 which moves the optical element 61 minutely.


Inventors:
SON HEI
SAITO TAKAYUKI
Application Number:
JP2005097354A
Publication Date:
October 12, 2006
Filing Date:
March 30, 2005
Export Citation:
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Assignee:
FUJINON CORP
International Classes:
G01B9/02; G01B11/16
Attorney, Agent or Firm:
Hiroshi Kawano