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Title:
SPECTRAL COLORIMETRY DEVICE AND IMAGE FORMING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2014077796
Kind Code:
A
Abstract:

To provide a spectral colorimetry device which is thin and compact in a direction vertical to a specimen and enables high-precision spectrometry.

A spectral colorimetry device includes a lighting optical system 2 which illuminates a specimen 4 arranged on a test surface, a spectroscopic element which disperses a light flux from the specimen, and a light guide optical system 5 which guides the light flux from the specimen to the spectroscopic element. The lighting optical system folds a light flux emitted from a light source and having the maximum intensity and guides it to the specimen. When a plane including a main optical line of the light flux made incident on the spectroscopic element and a main optical line of the light flux dispersed by the spectroscopic element is defined as a spectroscopic plane, the test surface and the spectroscopic plane are parallel to each other, and the test surface and a light-receiving plane of a light receiving element are not parallel to each other.


Inventors:
TAKIZAWA TOKUJI
TERAMURA MASAYASU
KIMURA KAZUMI
TOCHIGI NOBUYUKI
Application Number:
JP2013240694A
Publication Date:
May 01, 2014
Filing Date:
November 21, 2013
Export Citation:
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Assignee:
CANON KK
International Classes:
G01J3/50; G03G15/00; G03G15/01; G03G21/00
Domestic Patent References:
JP2001264173A2001-09-26
JP2007003415A2007-01-11
JP2009008471A2009-01-15
JPS61112930A1986-05-30
JPS5629436U1981-03-20
JP2010523984A2010-07-15
Foreign References:
WO2008124542A12008-10-16
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka



 
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