Title:
SPIN COATER AND SPIN-COATING METHOD
Document Type and Number:
Japanese Patent JPH0999265
Kind Code:
A
Abstract:
To form a thin film uniform in thickness on the surface of a substrate with a small amt. of coating soln.
A nozzle driving part 40 is connected to a nozzle 30, and the nozzle 30 is moved above a substrate W along the substrate W surface between the central part and peripheral part of the substrate. The nozzle 30 is connected to a tank 70 storing a liq. photoresist through the force-feed units 60a, 60b and 60c arranged in parallel to one another. The units 60a, 60b and 60c are independently controlled in accordance with the position of the nozzle 30, and the flow rate of the liq. photoresist to the nozzle 30 is gradually decreased as the nozzle 30 proceeds from the peripheral part of the substrate W to the central part.
Inventors:
MATSUI HIROSHI
Application Number:
JP25993395A
Publication Date:
April 15, 1997
Filing Date:
October 06, 1995
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
G03F7/16; B05C5/00; B05C11/06; B05C11/08; B05D1/40; H01L21/027; (IPC1-7): B05C11/06; B05C5/00; B05D1/40; G03F7/16; H01L21/027
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)