PURPOSE: To allow switching and combining of rotation and revolution and to easily uniformize the thickness of coated films by a revolving member which is fixed to the upper part of a main shaft, many stages of driving power transmission means which transmit the rotation of the main shaft to a jack shaft and the driven shafts fixed with coating containers and driving power intermitting mechanism which is provided on the main shaft.

CONSTITUTION: The revolving member (rotary disk) 4 is fixed to the upper part of the main shaft 1 which is rotated by driving of a driving source. The driving power intermitting mechanism 15 is provided on the main shaft 1. The driving power transmission means 5 to 7 which transmit the rotation of the main shaft 1 to the jack shaft 2 and many stages of the driving power transmission means 8 to 10, 11 to 13, 11' to 13' which transmit the rotation of the jack shaft to the driven shafts 3, 3' fixed with the coating containers 14, 14' are successively provided around the main shaft. The driving power is not transmitted to the rotary disk 4 in the upper part of the main shaft by the driving power intermitting mechanism 15 and only the rotation of the driven shafts 3, 3' and the containers 14, 14' is executed right after dropping of paints onto substrates 17, 17' in this constitution. The spin coating by the combination of the revolution and rotation is executed upon lapse of the prescribed time for the purpose of uniformizing the coated film thickness.