To provide a spin coater capable of preventing the contamination of the back surface of a substrate and a substrate holding table with a coating liquid and reducing the generation of quality defects.

This spin coater is provided with a substrate holding table 1 holding a substrate 4 on the upper surface and having a rotary shaft 2 attached on the back surface almost vertically to the surface of the substrate 4 and a coating liquid supply means for supplying the coating liquid on the upper surface of the substrate 4 held on the substrate holding table 1. A groove 5 for preventing the entering of the coating liquid along the peripheral part of the table 1 is formed on the upper surface of the table 1 in contact with the peripheral part back surface of the substrate 4.